Kameshwar Poolla

Award Received:

IEEE CSS Transition to Practice Award

Date Awarded:

2009

University of California-Berkeley

United States

Kameshwar Poolla

Biography

Dr. Kameshwar Poolla received the Bachelor of Technology degree from the Indian Institute of Technology, Bombay in 1980, and the Ph.D. degree from the University of Florida, Gainesville in 1984. He has served on the faculty of the Department of Electrical and Computer Engineering at the University of Illinois, Urbana from 1984 to 1991. Since then, he has been with the University of California, Berkeley where he is the Cadence Distinguished Professor of Mechanical Engineering and Electrical Engineering & Computer Sciences. He currently serves as the Director of the IMPACT center for Integrated Circuit manufacturing at the University of California. Dr. Poolla has also held visiting appointments at Honeywell, McGill University, M.I.T., Michigan, Columbia, and Padova. He has worked as a Field Engineer with Schlumberger on oilrigs in West Africa. In 1999, he co-founded OnWafer Technologies which offers metrology based yield enhancement solutions for the semiconductor industry. OnWafer was acquired by KLA-Tencor in 2007. He has also serves as a technology and mergers/acquisitions consultant for Cadence Design Systems. Dr. Poolla has been awarded a 1988 NSF Presidential Young Investigator Award, the 1993 Hugo Schuck Best Paper Prize, the 1994 Donald P. Eckman Award, the 1998 Distinguished Teaching Award of the University of California, and the IEEE Transactions on Semiconductor Manufacturing Best Paper Prizes in 2005 and 2007. Professor Poolla's research interests include System Identification, Robust Control, Semiconductor Manufacturing, Sensor Networks, and Medical Imaging.

Affiliation(s)

University of California-Berkeley

United States

Citation:

For innovative applications of control technologies to semiconductor manufacturing and the impact of the work on industry